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> Precision wafer positioner, translation & rotation
Precision wafer positioner, translation & rotation
Schlumberger Precision Wafer Positioner
Four degrees of freedom (x, y, rotation & one more) with verniers and locking capability
Accommodates various wafer sizes up to 6" (and possibly a little larger)
Well protected in specially-fitted, padded box
Appears to originlly be designed for Schlumberger IDS 5000 system
For additional information on the IDS equipment, listed separately, please click here.