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Amat XR80 implanter chamber vacuum cont 9090-00479ITL


AMAT XR80 Implanter Chamber Vacuum Cont 9090-00479ITL
* AMAT Model No: 9090-00479ITL
* 2 - Vacuum Control Drive - 0100-90177
* 2 - Vacuum Control Interlock - 0010-01032, 0100-01033
* 1 - Cryo Pump Temperature Monitor - 0200-90071
* 1 - Ion Gauge Controller - 0100-94091
* 2 - Thermistor Gauge Controller - 0100-03007, 0100-01351ITL
* 1 - Ion Gauge Power Supply - 0100-90093
* 1 - Vacuum System Control Panel - 0100-94037
* 1 - Back Plate - 0200-00773
* 1 - Creative Power Designs Power Supply - SRW-45-4004
* 1 - Omron Power Supply - S82K-10024



Amat XR80 implanter chamber vacuum cont 9090-00479ITL