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Drytek megastrip 6 plasma etcher w/2 PE1650's<


Drytek Megastrip 6 Plasma Etcher w/2 PE1650's AC Plasma Source (one pictured installed and one not installed in cabinet). In addition, this unit contains the following modules:
* (2) MKS Type 252 Exhause Valve Controllers
* (1) Time and RF Power Level Module
* (1) Optical Detector Module
* (1) MKS Pressure Module, PDR-C-IB
* (1) Chart Speed Module, CM/HR
* (1) MS-6 Main Circuit Controller
* (1) Utility Outlet with Athena Controls Auto-Tune
* (1) Edwards 40 Two Stage Pump and Motor



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