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> Plasma etcher, plasma-therm 790 rie, chiller, pump
Plasma etcher, plasma-therm 790 rie, chiller, pump
Plasma Etcher PLASMA-THERM PT-70 RIE System, Pump, Turbo Pump, Chiller and all Documentation.
Condition: Excellent rebuilt and ready to run. Well maintained for several years by our partner Odean Hefta in a local fab. System can be demonstrated and is offered with phone install support. The system has been rebuilt and tested as a complete system.
-Configured for Reactive Ion Etching
-Set up for 3" to 6" Round substrates
-Bottom Cathode RF Powered 13.56 MHZ
-Microprocessor Sequence Controlled
-Temperature controlled Chamber and Cathode
-Throttle Valve Pressure control
-Chiller Tek-Temp 208 VAC 1Phase
-Plasmatherm System 208 VAC 1 Phase
-Edwards Dry pump 208 VAC 3 Phase
-Cooling Water 2-6 GPH 20 Deg. C
-Gas inlet Regulated to 5-15 PS
