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Ae advanced energy rfg 1250 rf generator used in box
Advanced Energy RFG 1250 RF Generator
Part Number: 660-024637-002 Rev A
Typical Applications. Advanced Energy 13.56-MHz generators are intended for continuous hard use into a vacuum environment. They are most commonly used in RF sputtering, plasma etching/deposition, and reactive ion etching (RIE) applications where excellent regulation and extremely accurate power measurements make them the industry leader. For applications where multiple generators power a common chamber, the RFG and RFXII are available with common exciter mode capability. These generators have been designed for use with the most stringent fine-line geometry or rate-sensitive process recipes.
Up to five ramp and run time combinations can be stored in the RFXII.
Flexible Control. The RFXII can be controlled from a control panel (remote or attached), either of two analog/digital connectors, or a serial data port (RS-232 or RS-485). Multiple parallel interface choices are supported, which make retrofitting easy. Control settings are stored in nonvolatile memory so they are not lost when input power is interrupted.
The RFG, which is designed for integration of the power source close to where it is used, has no front panel. The RFG is controlled and monitored remotely through a simple 25-pin, parallel analog/digital interface only.
No Field Calibration Required. Each unit is calibrated against a precision standard before it leaves the factory, and no field adjustments are required. In fact, each unit's components are so stable that there are no adjustable parts. The modules within the unit can be replaced without affecting the calibration of the unit.
Built-in Protection. The RFG and RFXII power supplies have complete internal protection against overvoltage, overcurrent, reflected power, and open and short circuits. Generator safety interlocks are provided for easy integration into your system.
