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> Mks spectrum B3013 13.56MHZ, 3KW rf plasma generator
Mks spectrum B3013 13.56MHZ, 3KW rf plasma generator
MKS Spectrum B3013 13.56MHz, 3kW RF Plasma Generator
Unit Included: This unit come with POD interface and cable. There is no documents associate with unit
The Spectrum model B3013 has integrated auto-frequency tuning, thereby eliminating the need for a complex matching network.
The Spectrum RF Plasma Generator is used in Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching and other thin film applications during the manufacture of integrated circuits, photovoltaic devices, flat panel displays, optical media and industrial coatings.
