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> Sensarray: 8" process probe 1840 instrumented wafer
Sensarray: 8" process probe 1840 instrumented wafer
SensArray: 8" Process Probe 1840 Instrumented Wafer
"SensArray's 1800 series of RTD (Resistance Temperature Detector) Process Probe temperature instrumented wafers and glass substrates are used as a substitute for production wafers or masks in characterizing and capturing temperature data.
The Process Probe 1840A RTD instrumented wafer is designed for highly accurate wafer temperature measurements in semiconductor photoresist track systems, wafer probers, and many other types of semiconductor fabrication equipment. The very high measurement accuracy and stability result from the careful design integration of the Process Probe 1840A. The RTD sensors, bonding and encapsulation materials and the four-wire resistance measurement method are the key integrated elements. The 1840A operating temperature range is 0-250 C."
Obtained from a local lab that closed down.
Looks like it is brand new, but can't say for certain. Regardless the unit looks like it is in good condition.
Unit comes with software CD and Paperwork (what is pictured).
This appears to be a pretty high-end item.
For tons more info check out the links pasted below.
http:// /public/products/lithography/1840.html
http:// /public/docs/index.asp?doc=brochures/1840_PO_1108.pdf
http:// /lithography/1840.html
