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Prosys microduo rf megasonic generator wafer cleaner
Prosys MicroDuo RF MegaSonic Generator Wafer Cleaner
Use the links below to View More Images of the Prosys MicroDuo MicroPower RF Generator MicroPulse Controller
Prosys MicroDuo MicroPower RF Generator MicroPulse Controller - Front View
Prosys MicroDuo MicroPower RF Generator MicroPulse Controller - Close Up View
Prosys MicroDuo MicroPower RF Generator MicroPulse Controller - Back View
Prosys MicroDuo MicroPower RF Generator MicroPulse Controller - Back View Close Up
Prosys MicroDuo MicroPower Generator MicroPulse Controller
Model: MicroDuo MicroPower ( Generator ) MicroPulse ( Controller )
The MicroDuo comprised of the MicroPower (Generator) and MicroPulse
(Controller) are designed to work together for sophisticated RF applications
up to 200-watts. The typical application is for single wafer Megasonic cleaners or
small custom arrays. Currently stated as the generator & controller for the
Sapphire Megpie Radial Megasonic Array
* User I/O Port, Fwd/Refl Power Monitor, Patented
* Numerical Tuning, Wave and Process Recipe Management
* Pulse or continuous Wave Output
* Pulsed or Continuous Wave RF
* RF Power Output: 1 - 200 watts
* Frequency Range: 900 950kHz
* Main Power Requirement: From MicroPulse
* 1ms / 20% Duty Cycle (200s)
* 190 - 240VAC, 1 , 50/60Hz, 4A
Information from the web, specifications may vary
