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Tylan / mykrolis / celerity fm-360 mass flow controller
Tylan / Mykrolis / Celerity FM-360 Mass Flow Controller
Please call Brent Toll Free at 1-866-MHZ-ELEC (1-(***)-649-3532) if you have questions
* Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and the Tylan FM360 models are premium quality elastometer-sealed mass flow controllers and meters. These mass flow controllers combine proven components and techniques with innovation concepts in both mechanical and electrical design.
* Tylan FC260 and Tylan FM360 mass flow controllers and flow meters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections.
* Eliminates air convection currents inside its case without sacrificing response speed
* Can be mounted in any position without requiring zero adjustment
* Assures accuracy over the entire range of mass flow controller
* Easily removed for range changes
* Completely compatible with reactive and corrosive materials
* Design eliminates internal dead volumes
* Eliminates the need for complex, interactive multi-point linearization during calibration
