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> Abm-407B-1-s-ce-S293 robot track 300DFF1P pre-300BU
Abm-407B-1-s-ce-S293 robot track 300DFF1P pre-300BU
KLA Tencor Robot Interface Track 300DFF1P working
The interface features a PRI robot with end effector, prealigner, robot track, Asyst load ports, filter, and a robot controller with cables.
* Equipe PRI robot ABM-407B-1-S-CE-S293
* Asyst load ports 300FL, S2.1 25WFR; part no: 9700-5158-03
* Robot controller: ESC-218BT-S293; firmware version: V5.00I3A1