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> Novellus digital sioc pvd-mod assy. controller system
Novellus digital sioc pvd-mod assy. controller system
Novellus Digital SIOC PVD-MOD Assy. Controller System
Exterior Dimensions (L"*W"*H") : 10*11.5*7
This system includes the following parts/modules:
1x Novellus Digital Dynamics SIOC Chassis Mezzanine
Digital Dynamics PN: 02-122156-00
Field Connect PN: 03-127852-00
1x SIOC PECVD 1 Interlock PN: 02-057659-00
1x SIOC Controller V4.6 PN: 27-053659-00
1x SIOC Power Supply PN: 27-053660-00
1x SIOC C4D 0 Interlock PN: 02-157035-00
1x SIOCWTS HV 2 Interlock PN: 02-123975-00
