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> Lam research 4428 rainbow plasma etch 200MM
Lam research 4428 rainbow plasma etch 200MM
Manufacturer: Lam Research Corporation
Rainbow System Software Version E1 (Year 2000 Compliant) or later
Rainbow System Firmware Version G or later
EMPAK XT200 cassette input
Endpoint Detection System, 405/520nm end point box
Upper and lower RF mini-match
Power sensor, 1.8-32MHz for RF cal
High frequency dip board (PCB)
Gas Box- 8 process gas capability
Ergonomic Cassette Load/Unload
Upgraded wafer edge sensor, Rev. E
Adjustable load lock atmospheric switch
Special 24V Lockout switch
RGA test port Extended 1-piece test port with manual valve
Special floor-mounted 4 frame exhaust/6 Connection
Remote AC/DC power box with 24V fans
Lam Research 2080 or M&W CE Mark Chiller
Power Requirements 208VAC, 3 Phase, 30 Amp 50/60 Hz
